點擊圖片放大Perfrez® 5033(5035E)
Perfrez® 5033(5035E)
Specialty Hybrid
PERFREZ®5033 solves the problem where an FKM (known as Viton® in all their many mixes and grades) cannot handle the process chemistries but a FFKM (perfluoroelastomer) is an "overkill" solution.
In Advanced Technologies where killer defects are becoming a substantial issue,FKM's can produce particles that are caused from the use of industrial grade materials that are not clean room quality. This "Specialty Hybrid" offers the answer to production that requires longer sealing life, longer PM cycles, and the confidence such materials can offer without the harsh cost implications.
Even more, our specialty material is compounded in such a way that produces the best capabilities of this material and offers the highest chemical resistance possible. Nano-composition and improvements in manufacturing as well as clean-room steps make this the most ultimate, highest-grade of its class along with the strong physical properties that often hinder the success of FFKM's.
Semiconductor Applications & more:
200mm/300mm and more
| ．Deposition: CVD,APCVD | ．Ion Implant |
| ．HDPCVD, RPCVD, SACVD | ．MEMS |
| ．Poly Etch | ．LCD |
| ．Metal Etch | ．Solar |
Typical Physical Properties
| Color | Light beige | |
| PROPERTIES | ASTM | VALUE |
| Hardness, (Shore A) | D2240 | 80 +/-5 |
| Tensile Strength psi, (MPa), min | D1414 | 2248 (15.6) |
| Elongation, %, min | D1414 | 263 |
| Modulus at 100%, (MPa), min | D1414 | 935.5 (6.5) |
| Compression Set, 70 Hrs@200°C (392°F) | D395, Method B | 25 |
| Service Temperature ºC | -25C to 230C |
Features and Benefits
» Best in class of materials:
» nano-composition /special TFE filler Superior physical properties
» Higher temperature capabilities
» Better oxygen and fluorine compatibilit y Low particulation
» Low out-gassing
Sealing Applications:
| » Bell Jar Seals | » Isolator Valve Seals |
| » Chamber Lid Seals | » KF-Fittings |
| » Door Seals | » Slit Valves |
| » End Point Windows | » Window Seals |
| » Gas Inlet Seals |
PERFREZ®5033 Elemental Analysis:
Leachable 34 Elements by ICP-MS in Piranha
| Element | Units: ppb (ng/g) | Element | Units: ppb (ng/g) |
| Aluminum (Al) | 3 | Magnesium (Mg) | 0.8 |
| Antimony (Sb) | * | Manganese (Mn) | 0.1 |
| Arsenic (As) | 8 | Molybdenum (Mo) | * |
| Barium (Ba) | 0.3 | Nickel (Ni) | 0.3 |
| Beryllium (Be) | * | Niobium (Nb) | * |
| Bismuth (Bi) | * | Potassium (K) | * |
| Boron (B) | * | Rubidium (Rb) | * |
| Cadmium (Cd) | * | Sliver (Ag) | 8 |
| Calcium (Ca) | 13 | Sodium (Na) | 0.5 |
| Chromium (Cr) | * | Strontium (Sr) | * |
| Cobalt (Co) | * | Tantalum (Ta) | * |
| Gallium (Ga) | 6.4 | Thallium (Tl) | * |
| Germanium (Ge) | * | Tin (Sn) | * |
| Gold (Au) | * | Titanium (Ti) | * |
| Iron (Fe) | 2.9 | Vanadium (V) | * |
| Lead (Pb) | 0.2 | Zinc (Zn) | 15 |
| Lithium (Li) | * | Zirconium (Zr) | * |
