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Perfrez® 6041
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Perfrez® 9021
Product Description PERFREZ ® 9021 offer the broadest working temperature range and widest resistance to chemical media. Some of the unique properties of PERFREZ ® are： ．Outstanding resistance to very high temperature; ．Outstanding resistance to aggressive chemicals; ．Outstanding steam resistance; ．Outstanding compression set even at very high temperatures; Typical Physical Properties Hardness, Shore A +/-5 80 100% Modulus, MPa(psi) 9.35 Tensile at Break, MPa(psi) 20.5 Elongation at Break,% 185 Compression Set, % 336hr at 200°C (392°F) 26.3
Perfrez® 9071
Technical Datasheet PERFREZ® 9071, a black fluoroelastomer FFKM, is designed to withstand a broad range of chemicals and temperatures. On the basis of cost-performance ratio, PERFREZ® 9071 is an ideal choice for general-purpose use in the chemical process industry specifically. With its excellent resistance to acids, bases, amines, and other aggressive chemicals, this compound delivers good performance in a wide range of industrial applications and mixed process streams. This compound has a service temperature range from -10°C to 260°C. Recommended Applications Features and Benefits • Chemical and process industry • Excellent resistance to aggressive chemicals • Valves, pumps, filters (acid, base, amines) • Pressure vessels • Excellent performance in steam and hot water • Couplings and fittings • High sealing efficiency and outstanding sealing • Harsh chemical environments function • Compressors (high H2S concentration environments) • Painting and printing technology Typical Physical Properties Color Black PROPERTIES ASTM VALUE Hardness, (Shore A) D2240 75 -/+5 Tensile Strength psi, (MPa) D1414 2392(16.5) Elongation, % D1414 171 Modulus at 100% psi, (MPa) D1414 1009 (6.96) Compression Set, 70 Hrs@ 200°C D395, Method B 17.4 Minimum Operating Temperature -10°C Maximum Operating Temperature 260°C
Perfrez® 6075D
Technical Datasheet High Temperature Perfluoroelastomer for Plasma Applications Our Perfrez 6075D is designed for performance excellence. Perfrez 6075D is specially developed to handle the rigorous requirements of aggressive fluorine and oxygen based plasma while generating minimum particles. Perfrez 6075D offers a high purity solution for both static and dynamic applications such as etch, remote plasma cleans and deposition. Semiconductor Applications Applications: Deposition: CVD, APCVD, Chamber Lid Seals HDPCVD, RPCVD, SACVD Door Seals Plasma Etch: oxide and metal End Point Windows metal Gas Inlet Seals Ashing Isolator Valve Seals Ion Implant Slit Valves Etch Window Seals Typical Physical Properties Color Off-white PROPERTIES ASTM VALUE Hardness, (Shore A) D2240 76 -/+5 Tensile Strength psi, (MPa) D1414 2474 (17.06) Elongation, %** D1414 200 Modulus at 100% psi, (MPa) D1414 985 (6.79) Compression Set, 70 Hrs@ 200°C D395, Method B 38.7 Minimum Operating Temperature -20°C Maximum Operating Temperature 260°C **EVEN THOUGH ELONGATION PROPERTY IS INDICATED, MOST PERFLUROELASTOMER MATERIALS SHOULD NOT BE STRETCHED FOR OPTIMAL PERFORMANCE. Note: color variations may be observed in parts. Variations are considered to be cosmetic and inherent as a result of curing process, not indicative for foreign matter and is not expected to have an adverse effect on the performance of the part in service.
Perfrez® 6022
Technical Datasheet High Temperature Perfluoroelastomer for Plasma Applications PERFREZ®6022 This is a specially developed material to handle aggressive oxygen and fluorine based plasma while generating minimum particles. Features and Benefits •Superior physical properties •high temperature capabilities •excellent oxygen and fluorine compatibility •low particulation low outgassing ChemicalApplications Semiconductor Applications •Bell Jar seals •Isolator Valve Seals •Deposition: CVD, APCVD, •Chamber Lid Seals •Kf-Fittings •HDPCVD, RPCVD, SACVD •Door Seals •Slit Valves •Plasma Etch: oxide and metal •End Point Windows •Window Seals •Ashing •Gas Inlet Seals •Ion Implant •PVD, evaporation •RTP •Lamp Anneal •Diffusion TypicalPhysical Properties PROPERTIES ASTM VALUE Color Beige Material Type FFKM Hardness, Shore D2240 78 Tensile Strength, MPa (PSI) D1414 21,41 (3,085) Elongation at Break,% D1414 165 100% Modulus, MPa (psi) D1414 14,34 (2,065) Compression Set 72 hrs. @200℃ (392 ℉) D395 33 Minimum Operation Temperature -30℃ (-22℉) Minimum Operation Temperature 280℃ (536℉)
Perfrez® 6021
Technical Datasheet Applied Seal’s specialized manufacturing produces the only black Perfluoroelastomer O-Rings such as PERFREZ® 6021 in a dedicated clean room As one of a specialized line of Perfluoroelastomers developed for the harsh environments of the Semiconductor Industry, PERFREZ®6021 is utilized for processes that are mainly facing higher temperatures (above 230 degree C) or aqueous solutions. This material will outlast standard materials that impact process integrity. Designed for strength as well as relative cleanliness, this is an all-purpose material that can be an upgrade to most of the standard, less suitable sealing elements not acceptable for the stringent requirements of the Semiconductor, Solar and ‘Clean’ industries. Features and Benefits » High Temperature capabilities» Peroxide Curing System» Exceptional Heat Resistance» Broad Chemical Resistance Chemical Applications: » Organic Acids » Inorganic Acids » Bases » Amines » Steam or Hot Water » Ketones » Aldehydes Physical Properties Color Black PROPERTIES ASTM VALUE Hardness, (Shore A) D2240 80-/+5 Tensile Strength psi, (MPa), min D1414 3024 (15.2) Elongation, %, min D1414 164 Modulus at 100% psi, (MPa), min D1414 1513 (10.5) Minimum Operating Temperature -30°C (-22°F) Maximum Operating Temperature 300°C (572°F)
