Cleanroom-less
♦ Completely sealed case( =Minimal Shuttle) with local clean technology
| No more claean room |  | Only inside of the shuttle & tool ! | |
 |  |   |
Real ecological technology
♦ Minimum resources and energy consumption
Rapid Processing
♦ E.g. Minimal Maskless Exposure can significantly speed up an R&D process
♦ E.g. SOI-CMOS can be fabricated by total 98 processes in 5 days.
