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Perfrez® 6022
Perfrez® 6022
詳細介紹:
| Technical Datasheet |  | ||||||
| High Temperature Perfluoroelastomer for Plasma Applications | |||||||
| PERFREZ®6022 This is a specially developed material to handle aggressive oxygen and fluorine based plasma while generating minimum particles. | |||||||
| Features and Benefits | |||||||
| •Superior physical properties | |||||||
| •high temperature capabilities | |||||||
| •excellent oxygen and fluorine compatibility | |||||||
| •low particulation low outgassing | |||||||
| ChemicalApplications | |||||||
| Semiconductor Applications | •Bell Jar seals | •Isolator Valve Seals | |||||
| •Deposition: CVD, APCVD, | •Chamber Lid Seals | •Kf-Fittings | |||||
| •HDPCVD, RPCVD, SACVD | •Door Seals | •Slit Valves | |||||
| •Plasma Etch: oxide and metal | •End Point Windows | •Window Seals | |||||
| •Ashing | •Gas Inlet Seals | ||||||
| •Ion Implant |  | ||||||
| •PVD, evaporation | |||||||
| •RTP | |||||||
| •Lamp Anneal | |||||||
| •Diffusion | |||||||
TypicalPhysical Properties
| PROPERTIES | ASTM | VALUE |
| Color | Beige | |
| Material Type | FFKM | |
| Hardness, Shore | D2240 | 78 |
| Tensile Strength, MPa (PSI) | D1414 | 21,41 (3,085) |
| Elongation at Break,% | D1414 | 165 |
| 100% Modulus, MPa (psi) | D1414 | 14,34 (2,065) |
Compression Set 72 hrs. @200℃ (392 ℉) | D395 | 33 |
| Minimum Operation Temperature | -30℃ (-22℉) | |
| Minimum Operation Temperature | 280℃ (536℉) |
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Technical Datasheet High Temperature Perfluoroelastomer for Plasma Applications Our Perfrez 6075D is designed for performance excellence. Perfrez 6075D is specially developed to handle the rigorous requirements of aggressive fluorine and oxygen based plasma while generating minimum particles. Perfrez 6075D offers a high purity solution for both static and dynamic applications such as etch, remote plasma cleans and deposition. Semiconductor Applications Applications: Deposition: CVD, APCVD, Chamber Lid Seals HDPCVD, RPCVD, SACVD Door Seals Plasma Etch: oxide and metal End Point Windows metal Gas Inlet Seals Ashing Isolator Valve Seals Ion Implant Slit Valves Etch Window Seals Typical Physical Properties Color Off-white PROPERTIES ASTM VALUE Hardness, (Shore A) D2240 76 -/+5 Tensile Strength psi, (MPa) D1414 2474 (17.06) Elongation, %** D1414 200 Modulus at 100% psi, (MPa) D1414 985 (6.79) Compression Set, 70 Hrs@ 200°C D395, Method B 38.7 Minimum Operating Temperature -20°C Maximum Operating Temperature 260°C **EVEN THOUGH ELONGATION PROPERTY IS INDICATED, MOST PERFLUROELASTOMER MATERIALS SHOULD NOT BE STRETCHED FOR OPTIMAL PERFORMANCE. Note: color variations may be observed in parts. Variations are considered to be cosmetic and inherent as a result of curing process, not indicative for foreign matter and is not expected to have an adverse effect on the performance of the part in service.
