Perfrez 6022
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Perfrez® 6022
Perfrez® 6022
詳細介紹:
| Technical Datasheet |  | ||||||
| High Temperature Perfluoroelastomer for Plasma Applications | |||||||
| PERFREZ®6022 This is a specially developed material to handle aggressive oxygen and fluorine based plasma while generating minimum particles. | |||||||
| Features and Benefits | |||||||
| •Superior physical properties | |||||||
| •high temperature capabilities | |||||||
| •excellent oxygen and fluorine compatibility | |||||||
| •low particulation low outgassing | |||||||
| ChemicalApplications | |||||||
| Semiconductor Applications | •Bell Jar seals | •Isolator Valve Seals | |||||
| •Deposition: CVD, APCVD, | •Chamber Lid Seals | •Kf-Fittings | |||||
| •HDPCVD, RPCVD, SACVD | •Door Seals | •Slit Valves | |||||
| •Plasma Etch: oxide and metal | •End Point Windows | •Window Seals | |||||
| •Ashing | •Gas Inlet Seals | ||||||
| •Ion Implant |  | ||||||
| •PVD, evaporation | |||||||
| •RTP | |||||||
| •Lamp Anneal | |||||||
| •Diffusion | |||||||
TypicalPhysical Properties
| PROPERTIES | ASTM | VALUE |
| Color | Beige | |
| Material Type | FFKM | |
| Hardness, Shore | D2240 | 78 |
| Tensile Strength, MPa (PSI) | D1414 | 21,41 (3,085) |
| Elongation at Break,% | D1414 | 165 |
| 100% Modulus, MPa (psi) | D1414 | 14,34 (2,065) |
Compression Set 72 hrs. @200℃ (392 ℉) | D395 | 33 |
| Minimum Operation Temperature | -30℃ (-22℉) | |
| Minimum Operation Temperature | 280℃ (536℉) |
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